Formation of the ordered array of Al magic clusters on Si(111)7x7

Deposition of Al onto the Si(111)7x7 surface held at temperatures ranging from 475 to 600 degreesC has been found to result in the formation of a superlattice of the identical-size nanoclusters (magic clusters). The Al magic clusters appear to have the structure similar to that reported recently for the magic clusters of Ga and In on Si(111): each cluster contains six metal atoms linked by three Si atoms. The present results reveal that at the early stages of deposition all the group III metals demonstrate a distinct tendency for the formation of the magic clusters on Si surfaces.