A Magnetron Sputtering Method for the Application of the Ni Catalyst for the Synthesis Process of Carbon Nanotube Arrays

被引:6
|
作者
Kudinova, E. S. [1 ]
Vorobyeva, E. A. [1 ,2 ]
Ivanova, N. A. [1 ]
Tishkin, V. V. [1 ]
Alekseeva, O. K. [1 ]
机构
[1] Natl Res Ctr, Kurchatov Inst, Moscow 123098, Russia
[2] Moscow MV Lomonosov State Univ, Skobeltsyn Inst Nucl Phys, Moscow 119991, Russia
来源
NANOTECHNOLOGIES IN RUSSIA | 2020年 / 15卷 / 11-12期
基金
俄罗斯基础研究基金会;
关键词
CHEMICAL-VAPOR-DEPOSITION; IN-SITU; GROWTH; PERFORMANCE; FILM; CELL;
D O I
10.1134/S1995078020060129
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
A study on the optimization of the method of application of the Ni catalyst for the growth of carbon nanotubes (CNTs) onto the gas diffusion layers (GDLs) (predominantly carbon cloths) by magnetron sputtering is presented. The mode of magnetron sputtering of the Ni catalyst which makes it possible to obtain a uniform metal coating on the GDLs which is required for the successful synthesis of CNTs is selected for the first time. It is shown that the sputtering of Ni in the direct current mode with the supply of pulsed bias voltage to the substrate with a frequency of 100 kHz and time of supply of the negative pulse of 7 mu s makes it possible to obtain the optimum nanostructured coating of the metal with a low specific surface and a high degree of uniformity of application onto the entire area of the substrate. The applied Ni coating acts as the catalyst for the growth of CNTs. CNT arrays with the average diameters of 40 and 80 nm for the hydrophobic and hydrophilic GDLs, respectively, are grown on the GDLs with the applied Ni catalyst by pyrolytic gas-phase deposition. The CNT arrays are directly obtained on the entire surface of the carbon substrates with a high degree of uniformity. It is found that the diameter of the nanotubes is mainly determined by the structure of the GDL being used.
引用
收藏
页码:715 / 722
页数:8
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