Properties and electron field emission of highly resistive and transparent polymer-like a-C:H

The properties of polymer-like hydrogenated amorphous carbon films prepared by plasma enhanced chemical vapor deposition (PECVD) from CH4 or C2H6 diluted in H-2 are discussed. The application of the polymer-like a-C:H for the electron field emitter is also demonstrated. The electrical resistivity of the samples is >3.1 x 10(13) Ohm cm. The hydrogen density in the sample increases, the refractive index decreases and the optical gap increases with increasing gas ratio of CH4 or C2H6. The electron field emission from polymer-like a-C:H after dielectric breakdown is observed. Its threshold electric field is similar to 18 V/mu m. The polymer-like a-C:H might be applicable to an electron field emitter. (C) 2000 Elsevier Science B.V. All rights reserved.