Microplasma jet at atmospheric pressure

被引:115
|
作者
Hong, Yong Cheol [1 ]
Uhm, Han Sup [1 ]
机构
[1] Ajou Univ, Dept Mol Sci & Technol, Suwon 443749, South Korea
关键词
D O I
10.1063/1.2400078
中图分类号
O59 [应用物理学];
学科分类号
摘要
A nitrogen microplasma jet operated at atmospheric pressure was developed for treating thermally sensitive materials. For example, the plasma sources in treatment of vulnerable biological materials must operate near the room temperature at the atmospheric pressure, without any risk of arcing or electrical shock. The microplasma jet device operated by an electrical power less than 10 W exhibited a long plasma jet of about 6.5 cm with temperature near 300 K, not causing any harm to human skin. Optical emission measured at the wide range of 280-800 nm indicated various reactive species produced by the plasma jet. (c) 2006 American Institute of Physics.
引用
收藏
页数:3
相关论文
共 50 条
  • [31] ATMOSPHERIC PRESSURE MICROWAVE MICROPLASMA SOURCES
    Jasinski, Mariusz
    Kroplewski, Lukasz
    Zakrzewski, Zenon
    Mizeraczyk, Jerzy
    CHEMICKE LISTY, 2008, 102 : S1322 - S1326
  • [32] DEVELOPMENT OF AN ATMOSPHERIC PRESSURE AIR MICROPLASMA JET FOR THE SELECTIVE ETCHING OF PARYLENE-C FILM
    Guo, Honglei
    Liu, Jingquan
    Wang, Zhaoyu
    Wang, Xingzhao
    Chen, Xiang
    Yang, Bin
    Yang, Chunsheng
    2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015), 2015, : 268 - 271
  • [33] Low temperature, atmospheric pressure, direct current microplasma jet operated in air, nitrogen and oxygen
    A.-A.H. Mohamed
    J. F. Kolb
    K. H. Schoenbach
    The European Physical Journal D, 2010, 60 : 517 - 522
  • [34] Generation of microplasma jet at atmospheric pressure using a modified waveguide-based plasma torch
    Kanazawa, S.
    Daidai, R.
    Akamine, S.
    Ohkubo, T.
    SURFACE & COATINGS TECHNOLOGY, 2008, 202 (22-23): : 5275 - 5279
  • [35] An atmospheric-pressure microplasma jet source for the optical emission spectroscopic analysis of liquid sample
    Ichiki, T
    Koidesawa, T
    Horiike, Y
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 2003, 12 (04): : S16 - S20
  • [36] Silicon oxide synthesized using an atmospheric pressure microplasma jet from a tetraethoxysilane and oxygen mixture
    Ding, Yi
    Pan, Qingtao
    Jin, Jie
    Jia, Haijun
    Shirai, Hajime
    THIN SOLID FILMS, 2010, 518 (13) : 3487 - 3491
  • [37] Low temperature, atmospheric pressure, direct current microplasma jet operated in air, nitrogen and oxygen
    Mohamed, A. -A. H.
    Kolb, J. F.
    Schoenbach, K. H.
    EUROPEAN PHYSICAL JOURNAL D, 2010, 60 (03): : 517 - 522
  • [38] Deposition of Thin Films from Amino Group Containing Precursors with an Atmospheric Pressure Microplasma Jet
    Vogelsang, Andreas
    Ohl, Andreas
    Foest, Ruediger
    Schroeder, Karsten
    Weltmann, Klaus-Dieter
    PLASMA PROCESSES AND POLYMERS, 2011, 8 (01) : 77 - 84
  • [39] Time-resolved mass spectroscopic studies of an atmospheric-pressure helium microplasma jet
    Oh, Jun-Seok
    Aranda-Gonzalvo, Yolanda
    Bradley, James W.
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2011, 44 (36)
  • [40] Bacterial inactivation using atmospheric pressure single pin electrode microplasma jet with a ground ring
    Kim, Sun Ja
    Chung, T. H.
    Bae, S. H.
    Leem, S. H.
    APPLIED PHYSICS LETTERS, 2009, 94 (14)