共 50 条
- [41] Interactions between plasma and block copolymers used in directed self-assembly patterning [J]. ADVANCED ETCH TECHNOLOGY FOR NANOPATTERNING V, 2016, 9782
- [46] Directed self-assembly of block copolymers for 7 nanometre FinFET technology and beyond [J]. NATURE ELECTRONICS, 2018, 1 (10): : 562 - 569
- [48] Placement error in directed self-assembly of block copolymers for contact hole application [J]. JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2016, 15 (02):
- [50] Synthesis and self-assembly of bottlebrush block copolymers [J]. ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2005, 229 : U1103 - U1103