共 36 条
- [22] Magnetron sputtered Si-B-C-N films with high oxidation resistance and thermal stability in air at temperatures above 1500 °C JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2008, 26 (05): : 1101 - 1108
- [25] N-doped LaAlO3/Si(100) films with high-k, low-leakage current and good thermal stability CHINESE PHYSICS LETTERS, 2005, 22 (01): : 182 - 184