A novel six degrees-of-freedom parallel robot for MEMS fabrication

被引：13
|
作者：
Bamberger, Hagay [1 ]
Shoham, Moshe
机构：
[1] Technion Israel Inst Technol, RAFAEL Armanent Dev Author Ltd, IL-32000 Haifa, Israel
[2] Technion Israel Inst Technol, Robot Lab, IL-32000 Haifa, Israel
[3] Technion Israel Inst Technol, Fac Mech Engn, IL-32000 Haifa, Israel
来源：
IEEE TRANSACTIONS ON ROBOTICS | 2007年 / 23卷 / 02期
关键词：
microactuators; microelectromechanical devices; parallel mechanism; robot kinematics;
D O I：
10.1109/TRO.2006.889493
中图分类号：
TP24 [机器人技术];
学科分类号：
080202 ; 1405 ;
摘要：
This paper introduces a new architecture of a six degrees-of-freedom parallel robot suitable for microelectromechanical systems (MEMS) fabrication. The robot consists of only revolute joints for the passive joints, and linear actuators located at the base for the active ones, both of which are easier to manufacture in MEMS technology. The hybrid kinematic structure contains three single-loop submechanisms connected in parallel to the moving platform. The solutions of the inverse and direct kinematics problems are presented.
引用
收藏
页码：189 / 195
页数：7
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