We have developed a highly stable electro-optic KTa1-xNbxO3 ( KTN) deflector by enhancing electron transportation through KTN crystal. The amount of current is increased with 405-nm light irradiation to rapidly generate a stable refractive-index change, which induces deflection. The deflection angle is set at 160 mrad within tens of seconds and is kept at that angle for 3,000 hours. The developed deflector has been applied to a wavelength-swept light source to measure the thickness of Si wafers with a 3.6-mm optical length. The precision of 0.1-mu m has been continuously achieved corresponding to the stability of the KTN deflector.
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Flux Photon Inc, 580 Crespi Dr, Pacifica, CA 94044 USAStanford Univ, Ginzton Lab, 348 Via Pueblo Mall, Stanford, CA 94305 USA
Sarabalis, Christopher J.
Mayor, Felix M.
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Stanford Univ, Ginzton Lab, 348 Via Pueblo Mall, Stanford, CA 94305 USAStanford Univ, Ginzton Lab, 348 Via Pueblo Mall, Stanford, CA 94305 USA
Mayor, Felix M.
Stokowski, Hubert S.
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Stanford Univ, Ginzton Lab, 348 Via Pueblo Mall, Stanford, CA 94305 USAStanford Univ, Ginzton Lab, 348 Via Pueblo Mall, Stanford, CA 94305 USA
Stokowski, Hubert S.
Herrmann, Jason F.
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Stanford Univ, Ginzton Lab, 348 Via Pueblo Mall, Stanford, CA 94305 USAStanford Univ, Ginzton Lab, 348 Via Pueblo Mall, Stanford, CA 94305 USA
Herrmann, Jason F.
McKenna, Timothy P.
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Stanford Univ, Ginzton Lab, 348 Via Pueblo Mall, Stanford, CA 94305 USA
NTT Res Inc, 940 Stewart Dr, Sunnyvale, CA 94085 USAStanford Univ, Ginzton Lab, 348 Via Pueblo Mall, Stanford, CA 94305 USA
McKenna, Timothy P.
Lee, Nathan R. A.
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Stanford Univ, Ginzton Lab, 348 Via Pueblo Mall, Stanford, CA 94305 USAStanford Univ, Ginzton Lab, 348 Via Pueblo Mall, Stanford, CA 94305 USA
Lee, Nathan R. A.
Jiang, Wentao
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Stanford Univ, Ginzton Lab, 348 Via Pueblo Mall, Stanford, CA 94305 USAStanford Univ, Ginzton Lab, 348 Via Pueblo Mall, Stanford, CA 94305 USA
Jiang, Wentao
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Multani, Kevin K. S.
Safavi-Naeini, Amir H.
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Stanford Univ, Ginzton Lab, 348 Via Pueblo Mall, Stanford, CA 94305 USAStanford Univ, Ginzton Lab, 348 Via Pueblo Mall, Stanford, CA 94305 USA