Embedded control system for miniature robot for micro manipulation

In order to solve the problem of driving the miniature robot for MEMS (Micro Electronic Mechanical System) manipulation, an embedded control system is proposed in this paper. The system is small enough to be embedded in the body of the miniature robot. It integrates two miniature motor driving circuits and three drivers for piezo-actuator. By using the hyper-terminal of WINDOWS OPERATION SYSTEM, the embedded system can communicate with the host computer. So no specific software is needed during debugging the robot. Two blue-tooth modules are adopted to achieve communication between robot and host computer. And the information links at 115.2kbit/sec, so the demand of real time control can be meet absolutely. The whole volume of the system is no more than 60mm*40mm*10mm. It has been proved that the speed of miniature robot is up to 60mm/sec, and the positioning accuracy is 0.2mm. Micro driving module includes piezo-actuator and electromagnet driving circuit. The robot can move a micro step with the principle of inchworm. By this way, the speed of robot can reach 500 mu m/sec, the positioning accuracy is 50 mu m and the resolution is 50nm.