RESEARCH OF PROCESSING ERRORS ON MODAL FREQUENCY OF A DUAL-MASS DECOUPLED SILICON MICRO-GYROSCOPE

被引：0
|
作者：
Di, Hu [1 ,2 ]
Bo, Yang [1 ,2 ]
Bo, Dai [1 ,2 ]
机构：
[1] Southeast Univ, Sch Instrument Sci & Engn, Nanjing 210096, Jiangsu, Peoples R China
[2] Minist Educ, Key Lab Microinertial Instrument & Adv Nav Techno, Nanjing 210096, Jiangsu, Peoples R China
来源：
PROCEEDINGS OF THE 2015 JOINT INTERNATIONAL MECHANICAL, ELECTRONIC AND INFORMATION TECHNOLOGY CONFERENCE (JIMET 2015) | 2015年 / 10卷
关键词：
silicon micro-gyroscope; processing error; modal frequency; optimization;
D O I：
暂无
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
In this paper, the architecture, processing errors analysis and optimization method of a dual-mass silicon micro-gyroscope are presented. The dual-mass silicon micro-gyroscope consists of two identical single mass gyroscopes and a lever mechanism. Driving decoupling springs and sensing decoupling springs are key components to achieve motion decoupling. The processing error analysis indicates that the main influence of processing errors on modal frequency are width error of spring beams. The optimization method which increases the width of spring beams is adopted to reduce the effect of width errors on modal frequency. The structure optimization simulation results demonstrate that the frequency difference variation resulting from the processing errors decreased from 53.45% to 7.08% by increasing the width of spring beams.
引用
收藏
页码：426 / 430
页数：5
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