Calibration of mass sensors for surface roughness of their micro-resonators

In this study, the interplay between the sensitivity of mass sensors and the mode localization phenomenon of their resonators due to surface roughness is interpreted. A novel model of a micro-resonator with rough surfaces is developed. This model is used to calibrate mass sensors for the surface roughness of their micro-resonators. It is revealed that the resonance frequency of the micro-resonator either increases or decreases due to surface roughness. On one hand, the increase in the frequency is due to a mode localization where, because of the surface roughness, the vibration energy is confined over a small portion of the resonator's length. On the other hand, the decrease in the frequency is due to a globalization of the vibration energy where it distributes over an effective length longer than the resonator's length. The localization of the vibration energy enhances the sensitivity of mass sensors while the globalization of the vibration energy degrades the sensitivity of mass sensors. (C) 2019 Elsevier B.V. All rights reserved.