New techniques for laser micromachining MEMS devices

被引：5
|
作者：
Abbott, C [1 ]
Allott, R [1 ]
Bann, B [1 ]
Boehlen, K [1 ]
Gower, M [1 ]
Rumsby, P [1 ]
机构：
[1] Exitech Ltd, Oxford OX5 1QU, England
来源：
HIGH-POWER LASER ABLATION IV, PTS 1 AND 2 | 2002年 / 4760卷
关键词：
laser micromachining; inkjet printer nozzles; plasma display panels;
D O I：
10.1117/12.482096
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Two new laser mask projection techniques "Synchronized Image Scanning" (SIS) and "Bow Tie Scanning" (BTS) have been developed for the efficient fabrication of dense arrays of repeating 3D microstructures on large area substrates. Details of these techniques are given and examples of key industrial applications are demonstrated.
引用
收藏
页码：281 / 288
页数：8
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