共 50 条
- [32] A HIGH-PERFORMANCE NEGATIVE X-RAY RESIST - CPMS-X(PD) PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1985, 537 : 51 - 56
- [34] Optical design of high-performance beam lines for X-ray lithography Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 1999, 38 (6 A): : 3513 - 3521
- [35] HIGH-PERFORMANCE X-RAY SPECTROSCOPIC DEVICES FOR PLASMA MICROSOURCES INVESTIGATIONS PHYSICA SCRIPTA, 1994, 50 (04): : 333 - 338
- [36] High-performance Cr/Sc multilayers for the soft X-ray range ADVANCES IN MIRROR TECHNOLOGY FOR X-RAY, EUV LITHOGRAPHY, LASER, AND OTHER APPLICATIONS, 2004, 5193 : 172 - 176
- [38] Optical design of high-performance beam lines for X-ray lithography JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1999, 38 (6A): : 3513 - 3521