Micro-contact Printing of OTFT on Polymer Foils

被引:3
|
作者
Koenig, Martin [1 ]
Bock, Karlheinz [1 ]
Klink, Gerhard [1 ]
机构
[1] Fraunhofer IZM, D-80686 Munich, Germany
关键词
D O I
10.1109/ECTC.2009.5074183
中图分类号
TP3 [计算技术、计算机技术];
学科分类号
0812 ;
摘要
In the emerging field of large area electronics polymer foil substrates play a key role in large area and flexible electronic, illumination and display systems. Compared to silicon, however, coatings on polymer substrates and in particular foils are challenging to pattern on a scale below 10 mu m due to surface roughness and surface defects caused by industrial manufacturing processes. The presentation shows the latest results of patterning gold and copper metallised plastic films with micro-contact printing technology in the micron and submicron dimension. Considered are fabrication of the moulding master with a reactive ion deep etching process, stamp moulding, thiol-based resist transfer by a stamping process and finally etching of metal layers with cyanide and natriumpersulfate etchants. One benefit of micro-contact printing is the roughness-tolerant flexible PDMS stamp compensating particles and other surface defects. Although most of the experiments have been realised under conventional laboratory conditions the achieved critical dimension is below 1 mu m. Polymer transistors have been prototyped to demonstrate the capabilities of the mu CP-process for flexible electronic. Source drain electrodes were defined by the stamping process on polyimide foil. Top gate configurations with PEDOT as gate electrode as well as bottom gate configurations with silicon gate electrode have been successfully established. Electrical measurements of transistors with different channel length show performance of the transistor and transition towards short channel effects in organic devices. The results show that micro-contact printing is a valuable tool in organic and large area flexible systems, especially the selective processing of high resolution areas are beneficial for future applications.
引用
收藏
页码:1322 / 1324
页数:3
相关论文
共 50 条
  • [31] Micro-contact printing approaches to organic light-emitting diode pixels
    Wang, Qingwu
    Li, Weijin
    Jabbour, Ghassan E.
    Cui, Ji
    Marks, Tobin J.
    Kippelen, Bernard
    Peyghambarian, Nasser
    American Chemical Society, Polymer Preprints, Division of Polymer Chemistry, 1999, 40 (02): : 1248 - 1249
  • [32] Multi-colour micro-contact printing based on microfluidic network inking
    Crozatier, C
    Le Berre, M
    Chen, Y
    MICROELECTRONIC ENGINEERING, 2006, 83 (4-9) : 910 - 913
  • [33] Fabrication of copper wiring by micro-contact printing method and electroless plating and electroplating
    Tokoro, Kazuhiko
    Onoue, Miki
    Kojima, Keisuke
    Chikama, Katsumi
    Ushijima, Hirobumi
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2014, 53 (05)
  • [34] HIGH PRECISION METHOD FOR SEQUENTIAL MICRO-CONTACT PRINTING OF MULTIPLE ALIGNED PATTERNS
    Xu, Li
    Trinkle, Christine A.
    IMECE 2009: PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, VOL 12, PTS A AND B, 2010, : 803 - 804
  • [35] MICRO-CONTACT PRINTED MEMS
    Murarka, Apoorva
    Packard, Corinne
    Yaul, Frank
    Lang, Jeffrey
    Bulovic, Vladimir
    2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2011, : 292 - 295
  • [36] MICRO-CONTACT SPECTRA OF VANADIUM
    RYBALCHENKO, LF
    YANSON, IK
    FISUN, VV
    FIZIKA TVERDOGO TELA, 1980, 22 (07): : 2028 - 2033
  • [37] Phospholipid arrays on porous polymer coatings generated by micro-contact spotting
    Sekula-Neuner, Sylwia
    de Freitas, Monica
    Troester, Lea-Marie
    Jochum, Tobias
    Levkin, Pavel A.
    Hirtz, Michael
    Fuchs, Harald
    BEILSTEIN JOURNAL OF NANOTECHNOLOGY, 2017, 8 : 715 - 722
  • [38] Novel Strategies for Micro-Contact Printing Based Protein-Protein Interaction Detection
    Mueller, Ulrike
    Lanzerstorfer, Peter
    Arnold, Andreas
    Sevcsik, Eva
    Kreindl, Gerald
    Hoeglinger, Otmar
    Schuetz, Gerhard
    Weghuber, Julian
    BIOPHYSICAL JOURNAL, 2015, 108 (02) : 480A - 481A
  • [39] Agarose-Assisted Micro-Contact Printing for High-Quality Biomolecular Micro-Patterns
    Jang, Min Jee
    Nam, Yoonkey
    MACROMOLECULAR BIOSCIENCE, 2015, 15 (05) : 613 - 621
  • [40] Micro-contact printing of PEM thin films: effect of line tension and surface energies
    Gai, Meiyu
    Frueh, Johannes
    Girard-Egrot, Agnes
    Rebaud, Samuel
    Doumeche, Bastien
    He, Qiang
    RSC ADVANCES, 2015, 5 (64): : 51891 - 51899