X-ray microdiffraction imaging of a silicon microcantilever

A triple crystal x-ray topography technique with sample and analyzer mesh scans has been used to obtain micron resolution lattice orientation and strain maps of a single crystal silicon microcantilever. Both free and slightly bent states of the cantilever have been studied. The results show similar to 8 mdeg twist between the cantilever and the supporting base, 0.3 m radius of anticlastic curvature, and strain on the order of -2x10(-5) in the direction of surface normal. (c) 2007 American Institute of Physics.