Measurement of a discontinuous object based on a dual-frequency grating

被引:9
|
作者
Qiao Nao-Sheng [1 ]
Cai Xin-Hua [1 ]
Yao Chun-Mei [1 ]
机构
[1] Hunan Univ Arts & Sci, Sch Phys & Elect, Changde 415000, Peoples R China
关键词
dual-frequency grating; Fourier transform profilometry; measurement of discontinuous object; phase unwrapping; FOURIER-TRANSFORM PROFILOMETRY; AUTOMATIC-MEASUREMENT; HOLOGRAPHY; BARRIER;
D O I
10.1088/1674-1056/18/11/044
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
The dual-frequency grating measurement theory is proposed in order to carry out the measurement of a discontinuous object. Firstly, the reason why frequency spectra are produced by low frequency gratings and high frequency gratings in the field of frequency is analysed, and the relationship between the wrapped-phase and the unwrapping-phase is discussed. Secondly, a method to combine the advantages of the two kinds of gratings is proposed: one stripe is produced in the mutation part of the object measured by a suitable low frequency grating designed by MATLAB, then the phase produced by the low frequency grating need not be unfolded. The integer series of stripes is produced by a high frequency grating designed by MATLAB based on the frequency ratio of the two kinds of gratings and the high frequency wrapped-phase, and the high frequency unwrapping-phase is then obtained. In order to verify the correctness of the theoretical analysis, a steep discontinuous object of 600 x 600 pixels and 10.00 mm in height is simulated and a discontinuous object of ladder shape which is 32.00 mm in height is used in experiment. Both the simulation and the experiment can restore the discontinuous object height accurately by using the dual-frequency grating measurement theory.
引用
收藏
页码:4881 / 4886
页数:6
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