Ionization gas sensing in a microelectrode system with carbon nanotubes

被引:27
|
作者
Hou, Zhongyu [1 ]
Xu, Dong
Cai, Bingchu
机构
[1] Shanghai Jiao Tong Univ, Natl Key Lab Micronano Fabricat Technol, Shanghai 200030, Peoples R China
[2] Shanghai Jiao Tong Univ, Key Lab Thin Film & Microfabricat Minist Educ, Shanghai 200030, Peoples R China
[3] Shanghai Jiao Tong Univ, Res Inst Micro & Nano Sci & Technol, Shanghai 200030, Peoples R China
关键词
D O I
10.1063/1.2392994
中图分类号
O59 [应用物理学];
学科分类号
摘要
An efficient technology for manufacturing high-performance ionization gas sensors using carbon nanotubes as electrode materials that identify gases in some short sampling distance is developed in this letter. The microarray with five sensor units of different gap sizes (S approximate to 6, 7, 8, 10, and 12 mu m) can break down gases at distinct threshold voltages and currents depending on the gap size and gas species. The quite low operation voltage, high accuracy, and chip-based nature may be considered as significant improvements in ionization gas sensors. (c) 2006 American Institute of Physics.
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页数:3
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