Imaging deep trap distributions by low vacuum scanning electron microscopy

被引：7
|
作者：
Toth, Milos
Knowles, W. Ralph
Phillips, Matthew R.
机构：
[1] FEI Co, Newburyport, MA 01950 USA
[2] Univ Technol Sydney, Microstruct Anal Unit, Sydney, NSW 2007, Australia
来源：
APPLIED PHYSICS LETTERS | 2007年 / 90卷 / 07期
关键词：
D O I：
10.1063/1.2644159
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The distribution of deep traps in a bulk dielectric (Al2O3) is imaged by low vacuum scanning electron microscopy (LVSEM). The image contrast corresponds to spatial variations in radiation-induced, field-enhanced conductivity. A methodology is presented for identification of such contrast, the behavior of which is explained by a model of charge generation and transport in dielectrics imaged by LVSEM. The technique presented is applicable to studies of charge traps in dielectrics, device failure modes, and contrast mechanisms in electron microscopy. (c) 2007 American Institute of Physics.
引用
收藏
页数：3
相关论文
共 50 条
  • [1] Imaging charge trap distributions in GaN using environmental scanning electron microscopy
    Toth, M
    Kucheyev, SO
    Williams, JS
    Jagadish, C
    Phillips, MR
    Li, G
    APPLIED PHYSICS LETTERS, 2000, 77 (09) : 1342 - 1344
  • [2] Imaging and analysis in materials science by low vacuum scanning electron microscopy
    Thiel, BL
    INTERNATIONAL MATERIALS REVIEWS, 2004, 49 (02) : 109 - 122
  • [3] Consequences of positive ions upon imaging in low vacuum scanning electron microscopy
    Craven, JP
    Baker, FS
    Thiel, BL
    Donald, AM
    JOURNAL OF MICROSCOPY-OXFORD, 2002, 205 (01): : 96 - 105
  • [4] Salivary glands: Scanning and low vacuum scanning electron microscopy
    Konig, B
    Kaneda, K
    Watanabe, I
    JOURNAL OF DENTAL RESEARCH, 1996, 75 (05) : 1085 - 1085
  • [5] Charging processes in low vacuum scanning electron microscopy
    Thiel, BL
    Toth, M
    Craven, JP
    MICROSCOPY AND MICROANALYSIS, 2004, 10 (06) : 711 - 720
  • [6] On the role of electron-ion recombination in low vacuum scanning electron microscopy
    Toth, M
    Thiel, BL
    Donald, AM
    JOURNAL OF MICROSCOPY, 2002, 205 : 86 - 95
  • [7] Preliminary studies of asphaltene aggregates by low vacuum scanning electron microscopy
    Bragado, GAC
    Guzmán, ETR
    Yacamán, MJ
    PETROLEUM SCIENCE AND TECHNOLOGY, 2001, 19 (1-2) : 45 - 53
  • [8] Observation of the otolithic membrane by low-vacuum scanning electron microscopy
    Nakai, Y
    Masutani, H
    Kato, A
    Sugiyama, T
    ORL-JOURNAL FOR OTO-RHINO-LARYNGOLOGY AND ITS RELATED SPECIALTIES, 1996, 58 (01): : 9 - 12
  • [9] A differently pumped secondary electron detector for low-vacuum scanning electron microscopy
    Jacka, M
    Zadrazil, M
    Lopour, F
    SCANNING, 2003, 25 (05) : 243 - 246
  • [10] Secondary electron contrast in low-vacuum/environmental scanning electron microscopy of dielectrics
    Thiel, BL
    Toth, M
    JOURNAL OF APPLIED PHYSICS, 2005, 97 (05)
12345