MOCVD of HTS and GMR perovskites by aerosol and liquid delivery MOCVD

被引：21
|
作者：
Dahmen, KH [1 ]
Carris, MW [1 ]
机构：
[1] FLORIDA STATE UNIV, MARTECH, TALLAHASSEE, FL 32306 USA
来源：
JOURNAL OF ALLOYS AND COMPOUNDS | 1997年 / 251卷 / 1-2期
关键词：
MOCVD; magnetoresistance;
D O I：
10.1016/S0925-8388(96)02684-9
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Aerosol and liquid delivery MOCVD are techniques that were developed to overcome the problems with thermally less stable alkaline earth metal precursors in the deposition of alkaline earth doped HTS and GMR perovskites. In this paper, we will discuss the advantages and disadvantages of these techniques compared to the conventional MOCVD process. The deposition of CeO2 films as an intermediate buffer layer for the deposition of YBa2Cu3O7 on (1102) sapphire with Aerosol MOCVD will be discussed, as well as the deposition of alkaline earth doped lanthanum manganites, La1-xMxMnO3 (M=Ca, Sr) on LaAlO3, MgO and YSZ by liquid delivery MOCVD.
引用
收藏
页码：270 / 277
页数：8
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