Study of thermo-optic dispersion properties of aluminum nitride with an optical waveguide technique

被引：0
|
作者：
Yuan, YF [1 ]
Zhu, QY [1 ]
Chen, BX [1 ]
Fu, CS [1 ]
Li, P [1 ]
机构：
[1] Shanghai Univ Sci & Technol, Shanghai 200093, Peoples R China
来源：
APOC 2002: ASIA-PACIFIC OPTICAL AND WIRELESS COMMUNICATIONS, OPTIAL FIBER AND PLANAR WAVEGUIDE TECHNOLOGY II | 2002年 / 4904卷
关键词：
thermo-optic dispersion; aluminum nitride; waveguides measurement;
D O I：
10.1117/12.481263
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
An aluminum nitride thin film on sapphire substrate was prepared by metal-organic chemical-vapor deposition for optical waveguide study. In order to investigate thermo-optic dispersion properties of aluminum nitride waveguide, a new experimental arrangement is designed. The thermo-optic properties of thin film are obtained using a prism coupled waveguide devices, which has auto-temperature controlling system. The temperature range is 30degreesC - 85degreesC with the control accuracy of +1degreesC. The experiment was carried out by using different light source with wavelength of 441.6 nm, 514.5 nm, and 632.8 nm. A set of curve of thermo-optic dispersion of aluminum nitride film is given.
引用
收藏
页码：458 / 461
页数：4
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