Study of thermo-optic dispersion properties of aluminum nitride with an optical waveguide technique

An aluminum nitride thin film on sapphire substrate was prepared by metal-organic chemical-vapor deposition for optical waveguide study. In order to investigate thermo-optic dispersion properties of aluminum nitride waveguide, a new experimental arrangement is designed. The thermo-optic properties of thin film are obtained using a prism coupled waveguide devices, which has auto-temperature controlling system. The temperature range is 30degreesC - 85degreesC with the control accuracy of +1degreesC. The experiment was carried out by using different light source with wavelength of 441.6 nm, 514.5 nm, and 632.8 nm. A set of curve of thermo-optic dispersion of aluminum nitride film is given.