The preparation and oxygen-sensing properties of α-Ti3O5 thin film

被引：18
|
作者：
Zheng, LY [1 ]
机构：
[1] Chinese Acad Sci, Shanghai Inst Ceram, State Key Lab High Performance Ceram & Superfin, Shanghai 200050, Peoples R China
来源：
SENSORS AND ACTUATORS B-CHEMICAL | 2003年 / 88卷 / 02期
关键词：
oxygen-sensing; alpha-Ti3O5; film mechanism;
D O I：
10.1016/S0925-4005(02)00302-7
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
In this paper, the preparation and oxygen-sensing properties of alpha-Ti3O5 film are studied. By reducing TiO2 thin films in H-2 atmosphere at 1200 and 1250 degreesC, the Ti3O5 film with orthorhombic structure (alpha phase) can be obtained. The alpha-Ti3O5 film is stable up to 650 degreesC in air. The results of property investigation show that the alpha-Ti3O5 film has low resistance-temperature coefficient and certain oxygen-sensing properties, however, its oxygen-sensing properties need further improvement. To explain the oxygen-sensing mechanism of the alpha-Ti3O5 film, the surface phase transition hypothesis is raised. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：115 / 119
页数：5
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