Thin multilayer films of sputtered polytetrafluoroethylene (Teflon) and Fe54Ni27Co19 with different layer thicknesses were prepared by vapor-phase tandem deposition. The films show ferromagnetic resonance frequencies from 3.0 to 4.7 GHz and a high-frequency permeability in the range from 100 to 175, while having negligible losses up to 700 MHz and a quality factor Q up to 12 at 1 GHz. Thus these films could be promising candidates as high-frequency components used, for example, in mobile communication electronics. (c) 2006 American Institute of Physics.