SIMULATION ANALYSIS OF HIGH FREQUENCY AND HIGH PRESSURE PIEZOELECTRIC MICRO-PUMP

被引：0

作者：

Ni, Jiafeng ^{[1
]}

Xuan, Weipeng ^{[1
]}

Li, Yilin ^{[1
]}

Li, Wenjun ^{[1
]}

Dong, Shurong ^{[2
,3
,4
]}

Luo, Jikui ^{[2
,3
,4
]}

机构：

[1] Hangzhou Dianzi Univ, Minist Educ, Key Lab RF Circuits & Syst, Coll Elect & Info, Hangzhou 310018, Peoples R China

[2] Zhejiang Univ, Key Lab Adv Micro Nano Elect Dev & Smart Sys Zhej, Coll Info Sci & Elect Engn, Hangzhou 310027, Peoples R China

[3] Zhejiang Univ, ZJU Hangzhou Global Sci & Technol Innovat Ctr, Hangzhou 310027, Peoples R China

[4] Zhejiang Univ, Int Joint Innovat Ctr, Haining 314400, Peoples R China

来源：

2022 16TH SYMPOSIUM ON PIEZOELECTRICITY, ACOUSTIC WAVES, AND DEVICE APPLICATIONS, SPAWDA | 2022年

基金：

国家重点研发计划; 中国国家自然科学基金;

关键词：

Pump valve integrated; Piezoelectric micro-pump; High pressure; High frequency;

D O I：

10.1109/SPAWDA56268.2022.10046021

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

In this paper, a piezoelectric micro-pump with integrated valve based on synthetic jet structure is proposed. The piezoelectric micro-pump possesses a size of about 16mm*16mm*3mm, which works at the first-order resonant frequency of 11649Hz. With the rectangular wave driving signal has the amplitude of 24V, the average output flow of the piezoelectric micro-pump is about 139.5 mL /min. The maximum output pressure can reach more than 30 kPa. Compared with the existing piezoelectric pump, it has the advantages of high-pressure retention and small size, indicating a potential application in wearable device such as smart pressure watch.

引用

页码：468 / 472

页数：5

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