A study of the aging of α-Al2O3 dielectric material in DBD plasma

被引：0
|
作者：
Liu Cheng [1 ]
Zhang Zhitao [1 ]
Zhu Xiaofeng [1 ]
Yin Yan [1 ]
机构：
[1] Dalian Maritime Univ, Liaoning Prov Key Lab Strong Elect Field Ionizat, Dalian 116026, Peoples R China
来源：
PLASMA SCIENCE & TECHNOLOGY | 2006年 / 8卷 / 06期
关键词：
Al2O3; porcelain; dielectric material; DBD; dielectric barrier discharge;
D O I：
暂无
中图分类号：
O35 [流体力学]; O53 [等离子体物理学];
学科分类号：
070204 ; 080103 ; 080704 ;
摘要：
The performance of dielectric material is a key factor against a long time action in dielectric barrier discharge (DBD) plasma. In this study, the aging of the Al2O3 dielectric material was studied by the Atomic Force Microscope (AFM), X-ray Photoelectron spectrum (XPS) and Auger electron spectrum (AES) methods. The results showed that the performance of the dielectric does not descend after an 1000 h aging experiment. Therefore the thin dielectric layers of alpha-AL(2)O(3) porcelain with a purity above 99% can sustain a long time action of DBD plasma and form gas ionization discharges steadily.
引用
收藏
页码：693 / 696
页数：4
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