A study of the aging of α-Al2O3 dielectric material in DBD plasma

The performance of dielectric material is a key factor against a long time action in dielectric barrier discharge (DBD) plasma. In this study, the aging of the Al2O3 dielectric material was studied by the Atomic Force Microscope (AFM), X-ray Photoelectron spectrum (XPS) and Auger electron spectrum (AES) methods. The results showed that the performance of the dielectric does not descend after an 1000 h aging experiment. Therefore the thin dielectric layers of alpha-AL(2)O(3) porcelain with a purity above 99% can sustain a long time action of DBD plasma and form gas ionization discharges steadily.