A Mixed-Design Technique for Integrated MEMS Using a Circuit Simulator with HDL

被引：0

作者：

Toshiyoshi, Hiroshi ^{[1
]}

Konishi, Toshifumi ^{[2
]}

Machida, Katsuyuki ^{[2
]}

Masu, Kazuya ^{[3
]}

机构：

[1] Univ Tokyo, RCAST, Tokyo, Japan

[2] NTT Adv Technol Corp, Atsugi, Kanagawa, Japan

[3] Tokyo Inst Technol, Yokohama, Kanagawa, Japan

来源：

MIXED DESIGN OF INTEGRATED CIRCUITS AND SYSTEMS, MIXDES 2013 | 2013年

基金：

日本学术振兴会;

关键词：

integrated MEMS; multi-physics simulation; equivalent circuit; hardware description language;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report a multi-physics simulation and layout design technique for integrated-MEMS (microelectromechanical systems) based on an electrical circuit simulator. A solver for the mechanical equation of motion has been programmed in a Verilog-A compatible HDL (hardware description language) within the Cadence Virtuoso environment to attain new designing capabilities including automatic mask layout synthesis, DRC (design rule check), and LVS (layout-versus-schematic) verification for MEMS structures. Microelectromechanical components such as parallel-plate actuator and bending suspension are interpreted into HDL-coded equivalent circuits. Electrostatic displacement hysteresis is numerically simulated as a lumped mass-and-spring system and verified against the corresponding analytical simulation results. A multi-physics model for the Colpitts oscillator circuit has been built in the developed simulation environment, and its self-excited resonance has been confirmed by the simulation.

引用

页码：17 / 22

页数：6

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