KrF excimer laser-assisted combustion-flame deposition of diamond films

被引：4
|
作者：
Han, Y. X. [1 ]
Ling, H. [1 ]
Lu, Y. F. [1 ]
机构：
[1] Univ Nebraska, Dept Elect Engn, Lincoln, NE 68588 USA
来源：
JOURNAL OF APPLIED PHYSICS | 2006年 / 100卷 / 12期
关键词：
D O I：
10.1063/1.2402977
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Cobalt (Co) composition has detrimental effects on the deposition of diamond films on cemented tungsten carbide (WC-Co) substrates. It decreases adhesion of the deposited films to the substrates and causes a transformation of sp(3)-bonded diamond to sp(2)-bonded graphite. In this study, a KrF excimer laser with a wavelength of 248 nm, a pulse width of 23 ns, and a pulse energy range of 84-450 mJ was used in the combustion-flame method to improve the quality of the deposited diamond films. Scanning electron microscopy, energy dispersive x-ray analysis, and Raman spectroscopy of the deposited films showed that a laser irradiation during combustion-flame deposition of diamond decreased the cobalt composition drastically. Based on the experimental results, the influence of the laser irradiation on the deposition process was analyzed. (c) 2006 American Institute of Physics.
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页数：5
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