On-chip electron-impact ion source using carbon nanotube field emitters

被引：59
|
作者：
Bower, Christopher A. [1 ]
Gilchrist, Kristin H.
Piascik, Jeffrey R.
Stoner, Brian R.
Natarajan, Srividya
Parker, Charles B.
Wolter, Scott D.
Glass, Jeffrey T.
机构：
[1] RTI Int, Ctr Mat & Elect Technol, Res Triangle Pk, NC 27709 USA
[2] Duke Univ, Dept Elect & Comp Engn, Durham, NC 27708 USA
来源：
APPLIED PHYSICS LETTERS | 2007年 / 90卷 / 12期
基金：
美国国家科学基金会;
关键词：
D O I：
10.1063/1.2715457
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A lateral on-chip electron-impact ion source utilizing a carbon nanotube field emission electron source was fabricated and characterized. The device consists of a cathode with aligned carbon nanotubes, a control grid, and an ion collector electrode. The electron-impact ionization of He, Ar, and Xe was studied as a function of field emission current and pressure. The ion current was linear with respect to gas pressure from 10(-4) to 10(-1) Torr. The device can operate as a vacuum ion gauge with a sensitivity of approximately 1 Torr(-1). Ion currents in excess of 1 mu A were generated. (c) 2007 American Institute of Physics.
引用
收藏
页数：3
相关论文
共 50 条
  • [1] On-chip vacuum microtriode using carbon nanotube field emitters
    Bower, C
    Zhu, W
    Shalom, D
    Lopez, D
    Chen, LH
    Gammel, PL
    Jin, S
    [J]. APPLIED PHYSICS LETTERS, 2002, 80 (20) : 3820 - 3822
  • [2] Effect of nitrogen gas on the lifetime at carbon nanotube field emitters for electron-impact ionization mass spectrometry
    Getty, Stephanie A.
    Bis, Rachael A.
    Snyder, Stacy
    Gehrels, Emily
    Ramirez, Kristina
    King, Todd T.
    Roman, Patrick A.
    Mahaffy, Paul R.
    [J]. MICRO (MEMS) AND NANOTECHNOLOGIES FOR SPACE, DEFENSE, AND SECURITY II, 2008, 6959
  • [3] Carbon nanotube films as electron field emitters
    Bonard, JM
    Croci, M
    Klinke, C
    Kurt, R
    Noury, O
    Weiss, N
    [J]. CARBON, 2002, 40 (10) : 1715 - 1728
  • [4] Growth of carbon nanotube field emitters on single strand carbon fiber: a linear electron source
    Kim, Ha Jin
    Bae, Min Jong
    Kim, Yong C.
    Cho, Eun S.
    Sohn, Y. C.
    Kim, D. Y.
    Lee, S. E.
    Kang, H. S.
    Han, In T.
    Kim, Young H.
    Patole, Shashikant P.
    Yoo, Ji Beom
    [J]. NANOTECHNOLOGY, 2011, 22 (09)
  • [5] Evaluations of carbon nanotube field emitters for electron microscopy
    Nakahara, Hitoshi
    Kusano, Yoshikazu
    Kono, Takumi
    Saito, Yahachi
    [J]. APPLIED SURFACE SCIENCE, 2009, 256 (04) : 1214 - 1217
  • [6] Carbon nanotube-based electron field emitters
    Eletskii, A. V.
    [J]. PHYSICS-USPEKHI, 2010, 53 (09) : 863 - 892
  • [7] Electron field emitters based on carbon nanotube films
    deHeer, WA
    Bonard, JM
    Fauth, K
    Chatelain, A
    Forro, L
    Ugarte, D
    [J]. ADVANCED MATERIALS, 1997, 9 (01) : 87 - &
  • [8] High Current Cold Electron Source Based on Carbon Nanotube Field Emitters and Electron Multiplier Microchannel Plate
    Seelaboyina, Raghunandan
    Choi, Wonbong
    [J]. NSTI NANOTECH 2008, VOL 1, TECHNICAL PROCEEDINGS: MATERIALS, FABRICATION, PARTICLES, AND CHARACTERIZATION, 2008, : 59 - +
  • [9] Theory of Carbon Nanotube (CNT)-Based Electron Field Emitters
    Bocharov, Grigory S.
    Eletskii, Alexander V.
    [J]. NANOMATERIALS, 2013, 3 (03) : 393 - 442
  • [10] Numerical simulations of magnetic electron-impact ion source
    Ivanov, Dmitry
    Bourdon, Bernard
    [J]. INTERNATIONAL JOURNAL OF MASS SPECTROMETRY, 2019, 442 : 35 - 43
12345