High-efficiency low-cost integral screen-printing multicrystalline silicon solar cells

被引:20
|
作者
Szlufcik, J [1 ]
Duerinckx, F [1 ]
Horzel, J [1 ]
Van Kerschaver, E [1 ]
Dekkers, H [1 ]
De Wolf, S [1 ]
Choulat, P [1 ]
Allebe, C [1 ]
Nijs, J [1 ]
机构
[1] IMEC, Interuniv Microelect Ctr, Ind Solar Cells, B-3001 Louvain, Belgium
关键词
solar cells; crystalline silicon; manufacturing and processing;
D O I
10.1016/S0927-0248(02)00060-0
中图分类号
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号
0807 ; 0820 ;
摘要
This paper describes how the efficiency and throughput of industrial screen-printed multi-Si solar cells can be increased far beyond the state-of-the-art production cells. Implementation of novel processes of isotropic texturing, shallow emitter or single diffusion selective emitter, combined with screen-printed metallization fired through a PECVD SiNx ARC layer, have been described. Novel dedicated fabrication equipment for emitter diffusion and a PECVD SiNx deposition system are developed and implemented thereby removing the processing bottlenecks linked to the diffusion and bulk passivation processes. Several types of back-contacted solar cells with improved visual appeal required for building integrated photovoltaic (BIPV) application have been developed. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:155 / 163
页数:9
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