Fabrication of PdIr-coated conductive atomic force microscope tip and its application in nanofabrication

被引：0

作者：

Chen, HF ^{[1
]}

Song, JQ ^{[1
]}

Wang, YC ^{[1
]}

Liu, ZF ^{[1
]}

机构：

[1] Peking Univ, Coll Chem & Mol Engn, Ctr Nanoscale Sci & Technol, Beijing 100871, Peoples R China

来源：

MOLECULAR CRYSTALS AND LIQUID CRYSTALS SCIENCE AND TECHNOLOGY SECTION A-MOLECULAR CRYSTALS AND LIQUID CRYSTALS | 1999年 / 337卷

基金：

中国国家自然科学基金;

关键词：

AFM tip; Pd-Ir; nanofabrication;

D O I：

10.1080/10587259908023439

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

We report a new,conductive AFM tip, which is fabricated by thermal evaporation of 20-30nm PdIr alloy onto commercial silicon nitride cantilevers. With well-controlled evaporation conditions, a tip with nice electrical conductivity, good mechanical and chemical stabilities has been prepared. Thus fabricated AFM tips were used to measure electrical properties of materials with spatial resolution higher than 2nm, and to fabricate nanostructures on Zn-doped p-type GaAs (100) and chromium surfaces via field-induced oxidation.

引用

页码：309 / 312

页数：4

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