Development of Packed Column for Surface Acoustic Wave Gas Chromatograph Using Anodically Bonded Silicon-Glass Structure with a Compression Jacket

被引：12
|
作者：
Yamamoto, Yutaro [1 ,2 ]
Akao, Shingo [1 ,2 ,3 ]
Sakuma, Masanori [1 ,2 ]
Kobari, Kentaro [1 ,2 ]
Noguchi, Kazuhiro [1 ,2 ,3 ]
Nakaso, Noritaka [1 ,2 ,3 ]
Tsuji, Toshihiro [1 ,2 ]
Yamanaka, Kazushi [1 ,2 ]
机构：
[1] Tohoku Univ, Dept Mat Proc, Sendai, Miyagi 9808579, Japan
[2] JST, CREST, Chiyoda Ku, Tokyo 1020075, Japan
[3] Toppan Printing Co Ltd, Saitama 3458508, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 2009年 / 48卷 / 07期
关键词：
QUARTZ BALL; FABRICATION;
D O I：
10.1143/JJAP.48.07GG12
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Gas or liquid chromatographs (GC/LCs) are frequently used for multiple-compound sensing, but they are too large and heavy to be portable. To provide a handy GC/LC, many groups have proposed micro GC/LCs in which large columns are replaced by small microelectro-mechanical-system (MEMS) columns. However, because of the high packing pressure, a packed MEMS column using an anodically bonded structure has not been realized so far. In this study, we realized such a MEMS column for the first time by introducing a compression jacket to reduce the tensile stress at the silicon-glass boundary. Consequently we succeeded in the separation and detection of lower hydrocarbons using a ball surface acoustic wave sensor. (c) 2009 The Japan Society of Applied Physics
引用
收藏
页数：3
相关论文
共 11 条
  • [1] A test structure for characterization of the interface energy of anodically bonded silicon-glass wafers
    R. Knechtel
    M. Knaup
    J. Bagdahn
    [J]. Microsystem Technologies, 2006, 12 : 462 - 467
  • [2] A test structure for characterization of the interface energy of anodically bonded silicon-glass wafers
    Knechtel, R
    Knaup, M
    Bagdahn, J
    [J]. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2006, 12 (05): : 462 - 467
  • [3] Development of Microseparation Column for Ball Surface Acoustic Wave Gas Chromatograph
    Akao, Shingo
    Iwata, Naoya
    Sakuma, Masanori
    Ohnishi, Hidekazu
    Noguchi, Kazuhiro
    Tsuji, Toshihiro
    Nakaso, Noritaka
    Yamanaka, Kazushi
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 2008, 47 (05) : 4086 - 4090
  • [4] Development of High Precision Metal Micro-Electro-Mechanical-Systems Column for Portable Surface Acoustic Wave Gas Chromatograph
    Iwaya, Takamitsu
    Akao, Shingo
    Sakamoto, Toshihiro
    Tsuji, Toshihiro
    Nakaso, Noritaka
    Yamanaka, Kazushi
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 2012, 51 (07)
  • [5] Continuous Measurement of Multiple Gases Using Ball Surface Acoustic Wave Gas Chromatograph
    Sakamoto, Toshihiro
    Akao, Shingo
    Iwaya, Takamitsu
    Tsuji, Toshihiro
    Nakaso, Noritaka
    Yamanaka, Kazushi
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 2012, 51 (07)
  • [6] Development of ball surface acoustic wave gas chromatograph for environmental monitoring in spacecraft and its application on the ground
    Iwaya, Takamitsu
    Akao, Shingo
    Yamanaka, Kazushi
    Okano, Tatsuhiro
    Takeda, Nobuo
    Tsukahara, Yusuke
    Oizumi, Toru
    Fukushi, Hideyuki
    Sugawara, Maki
    Tsuji, Toshihiro
    Tanaka, Tomoki
    Takeda, Akinobu
    Shima, Asuka
    Matsumoto, Satoshi
    Sugahara, Haruna
    Hoshino, Takeshi
    Sakashita, Tetsuya
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 2022, 61 (SG)
  • [7] Detection of Contrabands in Cargo Containers Using a High-Speed Gas Chromatograph with Surface Acoustic Wave Sensor
    Staples, Edward J.
    Viswanathan, Shekar
    [J]. INDUSTRIAL & ENGINEERING CHEMISTRY RESEARCH, 2008, 47 (21) : 8361 - 8367
  • [8] Selective Detection of Aromatic Compounds with a Re-Designed Surface Acoustic Wave Sensor System Using a Short Packed Column
    Schmitt, Caroline Carriel
    Rapp, Michael
    Voigt, Achim
    De Carvalho, Mauro dos Santos
    [J]. COATINGS, 2022, 12 (11)
  • [9] Development of a Novel Odor Measurement System Using Gas Chromatography with Surface Acoustic Wave Sensor
    Staples, Edward J.
    Viswanathan, Shekar
    [J]. JOURNAL OF THE AIR & WASTE MANAGEMENT ASSOCIATION, 2008, 58 (12) : 1522 - 1528
  • [10] Development of Multiple-Gas Analysis Method Using the Ball Surface Acoustic Wave Sensor
    Yamamoto, Yutaro
    Akao, Shingo
    Nagai, Hiroki
    Sakamoto, Toshihiro
    Nakaso, Noritaka
    Tsuji, Toshihiro
    Yamanaka, Kazushi
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 2010, 49 (07)
12