High-precision optical profilometry at surfaces with varying materials

被引：0
|
作者：
Jennewein, H [1 ]
Ganz, T [1 ]
Gottschling, H [1 ]
Tschudi, T [1 ]
机构：
[1] Tech Univ Darmstadt, Inst Angew Phys, D-64289 Darmstadt, Germany
来源：
TECHNISCHES MESSEN | 1999年 / 66卷 / 11期
关键词：
D O I：
暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Optical Profilometry using the principle of heterodyne interferometry in combination with microellipsometry enables the simultaneous profile measurement and material characterization with high lateral resolution. We combined these two methods to interferometric profilometry with high accuracy even at probes consisting of laterally varying material.
引用
收藏
页码：447 / 454
页数：8
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