共 50 条
- [22] Patterning process for semiconductor using Directed Self-Assembly [J]. ALTERNATIVE LITHOGRAPHIC TECHNOLOGIES V, 2013, 8680
- [23] Defect source analysis of directed self-assembly process [J]. JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2013, 12 (03):
- [24] Process-directed self-assembly of copolymer materials [J]. ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2016, 252
- [25] Coordination Self-assembly Processes Revealed by Collaboration of Experiment and Theory: Toward Kinetic Control of Molecular Self-assembly [J]. CHEMICAL RECORD, 2021, 21 (03): : 443 - 459