Current status and future directions of SOI technology

Current status and future directions of SOI technology are reviewed, by discussing advantages and issues to be solved for MPU, RF, and other low-power applications. The possibility of future MOSFET scaling is also discussed for novel SOI device structures based on modified scaling scenarios. It is recognized that the progress of SOI technology is adding CMOS technology unique flexibility and possibilities, which are both expected to provide useful countermeasures for circumventing the present scaling crisis. (C) 2002 Elsevier Science Ltd. All rights reserved.