Fabrication and characterization of machined 3D diffractive optical elements

被引：3
|
作者：
Kuehne, Stefan [1 ]
Haskic, Kurt [1 ]
Lemke, Stephanie [2 ]
Schmidt, Martin [1 ]
机构：
[1] Tech Univ Berlin, Fachgebiet Mikro & Feingerate, IWF, D-10587 Berlin, Germany
[2] Helmholtz Zentrum Berlin Mat & Energie, Inst Nanometeropt & Technol, D-12489 Berlin, Germany
来源：
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2014年 / 20卷 / 10-11期
关键词：
Feed Rate; Ghost; Chip Thickness; Diffraction Efficiency; Diamond Tool;
D O I：
10.1007/s00542-014-2122-y
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The production of three dimensional blazed grating structures based on ultra-precision machining is an up-to-date issue. Hence, in the development of manufacturing technologies technology-related failure modes are generated due to structural variations. These failure errors must be recorded in cause and effect and then characterized by their type in order to achieve the optimum quality. This paper addresses the influence of processing parameters on the shape-persistence and hence on the grating quality and explains the possibility of detection and classification of them.
引用
收藏
页码：2103 / 2107
页数：5
相关论文
共 50 条
  • [11] Design and fabrication of diffractive optical elements
    Kusko, M
    Cojoc, D
    Apostol, D
    Muller, R
    Manea, E
    Podaru, C
    [J]. 2003 INTERNATIONAL SEMICONDUCTOR CONFERENCE, VOLS 1 AND 2, PROCEEDINGS, 2003, : 167 - 170
  • [12] Characterization and fabrication of MOEMS-based diffractive optical switching elements
    Verheggen, Jaap
    Panaman, Ganesh
    Castracane, James
    [J]. MOEMS DISPLAY, IMAGING, AND MINIATURIZED MICROSYSTEMS IV, 2006, 6114
  • [13] Fabrication of diffractive optical elements on 3-D curved surfaces by capillary force lithography
    Zhang, Dengying
    Yu, Weixing
    Wang, Taisheng
    Lu, Zhenwu
    Sun, Qiang
    [J]. OPTICS EXPRESS, 2010, 18 (14): : 15009 - 15016
  • [14] Investigating fabrication errors for diffractive optical elements
    Caley, Adam J.
    Braun, Markus
    Waddie, Andrew J.
    Taghizadeh, Mohammed R.
    [J]. MICRO-OPTICS, VCSELS, AND PHOTONIC INTERCONNECTS II: FABRICATION, PACKAGING, AND INTEGRATION, 2006, 6185
  • [15] 3D patterning method in femtosecond laser microprocessing using diffractive optical elements
    Kuroiwa, Y
    Takeshima, N
    Narita, Y
    Tanaka, S
    Hirao, K
    [J]. PHOTON PROCESSING IN MICROELECTRONICS AND PHOTONICS III, 2004, 5339 : 185 - 193
  • [16] Excimer laser fabrication of diffractive optical elements
    Winfield, RJ
    Meister, M
    Crean, GM
    Paineau, S
    [J]. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2000, 3 (5-6) : 481 - 486
  • [17] Analysis of the fabrication of diffractive optical elements in photopolymers
    Gallego, S.
    Marquez, A.
    Fernandez, R.
    Piera, A.
    Martinez, F. J.
    Ortuno, M.
    Frances, J.
    Belendez, A.
    Pascual, I.
    [J]. OPTICS AND PHOTONICS FOR INFORMATION PROCESSING VII, 2013, 8855
  • [18] Emerging fabrication methods for diffractive optical elements
    Suleski, TF
    Baggett, B
    Delaney, WF
    Kathman, AD
    [J]. DIFFRACTIVE AND HOLOGRAPHIC TECHNOLOGIES, SYSTEMS, AND SPATIAL LIGHT MODULATORS VI, 1999, 3633 : 26 - 34
  • [19] 3D Switchable Diffractive Optical Elements Fabricated with Two-Photon Polymerization
    O'Neill, John Sandford
    Salter, Patrick
    Zhao, Zimo
    Chen, Bohan
    Daginawalla, Hassan
    Booth, Martin J.
    Elston, Steve J.
    Morris, Stephen M.
    [J]. ADVANCED OPTICAL MATERIALS, 2022, 10 (07)
  • [20] Scatterometric characterization of diffractive optical elements
    Saastamoinen, Toni
    Husu, Hannu
    Laukkanen, Janne
    Siitonen, Samuli
    Turunen, Jari
    Lassila, Antti
    [J]. INSTRUMENTATION, METROLOGY, AND STANDARDS FOR NANOMANUFACTURING, OPTICS, AND SEMICONDUCTORS VIII, 2014, 9173
12345