Fabrication and characterization of machined 3D diffractive optical elements

被引：3
|
作者：
Kuehne, Stefan [1 ]
Haskic, Kurt [1 ]
Lemke, Stephanie [2 ]
Schmidt, Martin [1 ]
机构：
[1] Tech Univ Berlin, Fachgebiet Mikro & Feingerate, IWF, D-10587 Berlin, Germany
[2] Helmholtz Zentrum Berlin Mat & Energie, Inst Nanometeropt & Technol, D-12489 Berlin, Germany
来源：
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2014年 / 20卷 / 10-11期
关键词：
Feed Rate; Ghost; Chip Thickness; Diffraction Efficiency; Diamond Tool;
D O I：
10.1007/s00542-014-2122-y
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The production of three dimensional blazed grating structures based on ultra-precision machining is an up-to-date issue. Hence, in the development of manufacturing technologies technology-related failure modes are generated due to structural variations. These failure errors must be recorded in cause and effect and then characterized by their type in order to achieve the optimum quality. This paper addresses the influence of processing parameters on the shape-persistence and hence on the grating quality and explains the possibility of detection and classification of them.
引用
收藏
页码：2103 / 2107
页数：5
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