Remeasurement of the (220) lattice spacing of silicon

被引:0
|
作者
Cavagnero, G [1 ]
Durando, G [1 ]
Mana, D [1 ]
Massa, E [1 ]
Zosi, G [1 ]
机构
[1] CNR, Inst Metrol G Colonnetti, I-10135 Turin, Italy
关键词
D O I
10.1109/CPEM.2002.1034971
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A need arose for a reduction of the present relative uncertainty in the measurement of the silicon lattice spacing down to 10(-9). This article describes our advances towards this goal.
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页码:562 / 563
页数:2
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