Remeasurement of the (220) lattice spacing of silicon

被引：0
|
作者：
Cavagnero, G [1 ]
Durando, G [1 ]
Mana, D [1 ]
Massa, E [1 ]
Zosi, G [1 ]
机构：
[1] CNR, Inst Metrol G Colonnetti, I-10135 Turin, Italy
来源：
2002 CONFERENCE ON PRECISION ELECTROMAGNETIC MEASUREMENTS, CONFERENCE DIGEST | 2002年
关键词：
D O I：
10.1109/CPEM.2002.1034971
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A need arose for a reduction of the present relative uncertainty in the measurement of the silicon lattice spacing down to 10(-9). This article describes our advances towards this goal.
引用
收藏
页码：562 / 563
页数：2
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