The five parameter grain boundary character distribution of polycrystalline silicon

The purpose of this paper is to describe the five-parameter grain boundary character distribution (GBCD) of polycrystalline silicon and compare it to distributions measured in metals and ceramics. The GBCD was determined from the stereological analysis of electron backscatter diffraction maps. The distribution of grain boundary disorientations is non-random and has peaks at 36A degrees, 39A degrees, 45A degrees, 51A degrees, and 60A degrees. The axis-angle distribution reveals that most of the grain boundaries have misorientations around the [111], [110], and [100] axes. The most common grain boundary type (30 % number fraction) has a 60A degrees misorientation around [111] and of these boundaries, the majority are twist boundaries. For other common boundaries, symmetric tilt configurations are preferred. The grain boundary character distribution of Si is distinct from those previously observed for metals and ceramics. The measured grain boundary populations are inversely correlated to calculated grain boundary energies available in the literature.