Investigation of the time evolution of plasma parameters in a pulsed magnetron discharge

被引：3
|
作者：
Stranak, V.
Adamek, P.
Blazek, J.
Spatenka, P.
Hubicka, Z.
Tichy, M.
Hippler, R.
Wrehde, S.
机构：
[1] Univ S Bohemia, Dept Phys, Ceske Budejovice 38715, Czech Republic
[2] Acad Sci Czech Republ, Inst Phys, Prague 18000, Czech Republic
[3] Charles Univ Prague, Fac Math & Phys, CR-18000 Prague 8, Czech Republic
[4] Ernst Moritz Arndt Univ Greifswald, Inst Phys, D-17489 Greifswald, Germany
来源：
CZECHOSLOVAK JOURNAL OF PHYSICS | 2006年 / 56卷
关键词：
pulsed magnetron; time resolved measurements; Langmuir probe;
D O I：
10.1007/s10582-006-0375-0
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
Unbalanced DC pulse magnetron discharge with Ti target in Ar and Ar/O-2 working gases was investigated by means of time resolved Lagmuir probe diagnostics. We have used in our work very low average DC discharge current up to 1 A but high instant discharge current about 10 A in the active part of pulse Cycle. The experiments were carried out under higher pressures (up to 15 Pa) than usual. Temporal evolutions of internal plasma parameters such as electron density, electron temperature, plasma potential and EEPF are determined from the time-resolved probe data as dependences on pressure.
引用
收藏
页码：B1364 / B1370
页数：7
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