Wideband Air-Coupled CMUT Arrays for Acoustic Micro-Tapping

被引：0

作者：

Coutant, Zachary A. ^{[1
]}

Adelegan, Oluwafemi ^{[1
]}

Biliroglu, Ali Onder ^{[1
]}

Jeng, Geng-Shi ^{[2
]}

Pitre, John J., Jr. ^{[2
]}

Kirby, Mitchell A. ^{[2
]}

Pelivanov, Ivan ^{[2
]}

Yamaner, Feysel Yalcin ^{[1
]}

O'Donnell, Matthew ^{[2
]}

Oralkan, Omer ^{[1
]}

机构：

[1] NC State Univ, Dept Elect & Comp Engn, Raleigh, NC 27695 USA

[2] Univ Washington, Dept Bioengn, Seattle, WA 98195 USA

来源：

PROCEEDINGS OF THE 2020 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS) | 2020年

基金：

美国国家科学基金会;

关键词：

CMUT; Air Coupled Transducers; Acoustic Micro-Tapping;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a 32-element one-dimensional air-coupled capacitive micromachined ultrasonic transducer (CMUT) array designed to be part of a non-contact elastography system. To achieve the required bandwidth in air, staggered cell sizes are used. The completed devices showed a surface pressure of 950 Pa at the center frequency of 1.45 MHz. The 3-dB, 6-dB, and 10-dB fractional bandwidths are 5%, 10%, and 12.8%.

引用

页数：3

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