Wideband Air-Coupled CMUT Arrays for Acoustic Micro-Tapping

被引：0

作者：

Coutant, Zachary A. ^{[1
]}

Adelegan, Oluwafemi ^{[1
]}

Biliroglu, Ali Onder ^{[1
]}

Jeng, Geng-Shi ^{[2
]}

Pitre, John J., Jr. ^{[2
]}

Kirby, Mitchell A. ^{[2
]}

Pelivanov, Ivan ^{[2
]}

Yamaner, Feysel Yalcin ^{[1
]}

O'Donnell, Matthew ^{[2
]}

Oralkan, Omer ^{[1
]}

机构：

[1] NC State Univ, Dept Elect & Comp Engn, Raleigh, NC 27695 USA

[2] Univ Washington, Dept Bioengn, Seattle, WA 98195 USA

来源：

PROCEEDINGS OF THE 2020 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS) | 2020年

基金：

美国国家科学基金会;

关键词：

CMUT; Air Coupled Transducers; Acoustic Micro-Tapping;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a 32-element one-dimensional air-coupled capacitive micromachined ultrasonic transducer (CMUT) array designed to be part of a non-contact elastography system. To achieve the required bandwidth in air, staggered cell sizes are used. The completed devices showed a surface pressure of 950 Pa at the center frequency of 1.45 MHz. The 3-dB, 6-dB, and 10-dB fractional bandwidths are 5%, 10%, and 12.8%.

引用

页数：3

共 50 条

[1] Fabrication and Characterization of a Wideband Low-Frequency CMUT Array for Air-Coupled Imaging
Zhang, Hui
Liang, Dongmei
Wang, Zhuochen
Ye, Lei
Rui, Xiaobo
Zhang, Xiaoli
[J]. IEEE SENSORS JOURNAL, 2020, 20 (23) : 14090 - 14100
[2] A FPGA Based Front-end Circuit for Air-coupled CMUT Arrays: Preliminary Design
Ye, Lei
Li, Jian
Liang, Dongmei
Zhang, Hui
Yu, Lu
Wang, Zhuochen
[J]. PROCEEDINGS OF THE 2020 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2020,
[3] Simulation of acoustic losses in waveguides for air-coupled ultrasonic phased arrays
Rutsch, Matthias
Schultz-Fademrecht, Leon
Allevato, Gianni
Haugwitz, Christoph
Hinrichs, Jan
Kupnik, Mario
[J]. 2022 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IEEE IUS), 2022,
[4] Wideband electromagnetic dynamic acoustic transducers (WEMDATs) for air-coupled ultrasonic applications
Kang, Lei
Feeney, Andrew
Dixon, Steve
[J]. APPLIED PHYSICS LETTERS, 2019, 114 (05)
[5] Wideband Electromagnetic Dynamic Acoustic Transducer as a Standard Acoustic Source for Air-coupled Ultrasonic Sensors
Kang, Lei
Feeney, Andrew
Somerset, Will
Dixon, Steve
[J]. 2019 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2019, : 2481 - 2484
[6] A linear cMUT air-coupled array for NDE based on MUMPS
Octavio, A.
Martin, C. J.
Martinez, O.
Hernando, J.
Gomez-Ullate, L.
de Espinosa, T. Montero
[J]. 2007 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1-6, 2007, : 2127 - +
[7] A compact acoustic waveguide for air-coupled ultrasonic phased arrays at 40 kHz
Rutsch, Matthias
Allevato, Gianni
Hinrichs, Jan
Haugwitz, Christoph
Augenstein, Regine
Kaindl, Thomas
Kupnik, Mario
[J]. 2022 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IEEE IUS), 2022,
[8] A CMUT Array Based on Annular Cell Geometry for Air-coupled Applications
Na, Shuai
Wong, Lawrence L. P.
Chen, Albert I. H.
Li, Zhenhao
Macecek, Mirek
Yeow, John T. W.
[J]. 2016 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2016,
[9] Air-coupled linear and sparse cMUT array manufactured using MUMPs process
Alberto Octavio
Richard L. O’Leary
Simon M. Whiteley
Óscar Martínez-Graullera
Carlos J. Martín-Arguedas
Luis Gómez-Ullate
Francisco Montero de Espinosa
[J]. Microsystem Technologies, 2011, 17
[10] Air-Coupled Acoustic Testing for Pavement System
Al-Adhami, Hiba
Gucunski, Nenad
[J]. PANAM UNSATURATED SOILS 2017: APPLICATIONS, 2018, (302): : 217 - 227

← 1 2 3 4 5 →