A Wide Tuning Range MEMS Varactor Based on a Toggle Push-Pull Mechanism

被引：7

作者：

Farinelli, Paola ^{[1
]}

Solazzi, Francesco ^{[2
]}

Calaza, Carlos ^{[2
]}

Margesin, Benno ^{[2
]}

Sorrentino, Roberto ^{[3
]}

机构：

[1] RF Microtech, Via G Duranti 93, I-06125 Perugia, Italy

[2] FBK irst, MEMSRaD Res Unit, I-38050 Trento, Italy

[3] Univ Perugia, Elect & Informat Engn Dept, I-06125 Perugia, Italy

来源：

2008 EUROPEAN MICROWAVE INTEGRATED CIRCUITS CONFERENCE (EUMIC) | 2008年

关键词：

D O I：

10.1109/EMICC.2008.4772332

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a novel wide tuning range MEMS varactor based on a toggle push - pull mechanism for high RF power applications and improved reliability. The device anchoring utilizes a torsion spring mechanism which virtually allows for a full capacitance tuning range. Improved mechanical stability is also provided by the actively controlled pull-out implementation that is realized without increasing the MEMS manufacturing complexity. As a proof of concept, a toggle MEMS varactor has been modeled, designed and manufactured in shunt configuration on a 50 Omega coplanar transmission line. Analytical and full wave electromechanical models are provided as well as electromagnetic characterization. The device has been manufactured on HR Silicon substrate by using the standard FBK-irst RF MEMS process. Optical profile, DC and RF measurements are presented in the 040 GHz frequency band. Excellent RF performance as well as a capacitance tuning ratio of 2.5 has been obtained.

引用

页码：474 / +

页数：2

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