A Wide Tuning Range MEMS Varactor Based on a Toggle Push-Pull Mechanism

被引：7
|
作者：
Farinelli, Paola [1 ]
Solazzi, Francesco [2 ]
Calaza, Carlos [2 ]
Margesin, Benno [2 ]
Sorrentino, Roberto [3 ]
机构：
[1] RF Microtech, Via G Duranti 93, I-06125 Perugia, Italy
[2] FBK irst, MEMSRaD Res Unit, I-38050 Trento, Italy
[3] Univ Perugia, Elect & Informat Engn Dept, I-06125 Perugia, Italy
来源：
2008 EUROPEAN MICROWAVE INTEGRATED CIRCUITS CONFERENCE (EUMIC) | 2008年
关键词：
D O I：
10.1109/EMICC.2008.4772332
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents a novel wide tuning range MEMS varactor based on a toggle push - pull mechanism for high RF power applications and improved reliability. The device anchoring utilizes a torsion spring mechanism which virtually allows for a full capacitance tuning range. Improved mechanical stability is also provided by the actively controlled pull-out implementation that is realized without increasing the MEMS manufacturing complexity. As a proof of concept, a toggle MEMS varactor has been modeled, designed and manufactured in shunt configuration on a 50 Omega coplanar transmission line. Analytical and full wave electromechanical models are provided as well as electromagnetic characterization. The device has been manufactured on HR Silicon substrate by using the standard FBK-irst RF MEMS process. Optical profile, DC and RF measurements are presented in the 040 GHz frequency band. Excellent RF performance as well as a capacitance tuning ratio of 2.5 has been obtained.
引用
收藏
页码：474 / +
页数：2
相关论文
共 50 条
  • [1] A Wide Tuning Range MEMS Varactor Based on a Toggle Push-Pull Mechanism
    Farinelli, Paola
    Solazzi, Francesco
    Calaza, Carlos
    Margesin, Benno
    Sorrentino, Roberto
    2008 EUROPEAN MICROWAVE CONFERENCE, VOLS 1-3, 2008, : 325 - +
  • [2] A novel varactor diodeless push-push VCO with wide tuning range
    Min, Sangbo
    Lee, Moon-Que
    MICROWAVE AND OPTICAL TECHNOLOGY LETTERS, 2006, 48 (08) : 1569 - 1572
  • [3] MEMS Based Mechanical Resonant Push-Pull Scanning Endoscope
    Gu, Kebin
    Tsui, Chileung
    Wang, Wei-Chih
    INTEGRATED OPTOELECTRONICS 6, 2013, 45 (33): : 7 - 16
  • [4] 10-25 GHz frequency reconfigurable MEMS 5-bit phase shifter using push-pull actuator based toggle mechanism
    Dey, Sukomal
    Koul, Shiban K.
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2015, 25 (06)
  • [5] Aluminum-Based Push-Pull Electrostatic MEMS Transducer for Earphones
    Zamir A.
    Seiden G.
    Kupershmidt H.
    AES: Journal of the Audio Engineering Society, 2022, 70 (10): : 894 - 908
  • [6] A wide tuning range gated varactor
    Wong, WMY
    Hui, PS
    Chen, ZH
    Shen, KQ
    Lau, J
    Chan, PCH
    Ko, PK
    IEEE JOURNAL OF SOLID-STATE CIRCUITS, 2000, 35 (05) : 773 - 779
  • [7] A UHF SiGe Push-Pull Quartz MEMS Oscillator
    Moyer, H. P.
    Yoon, Y.
    Xu, Z. A.
    Nagele, R. G.
    Kirby, D. J.
    Kubena, R. L.
    Joyce, R. J.
    Bowen, R. L.
    Chang, D. T.
    2014 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (FCS), 2014, : 251 - 254
  • [8] UHF SiGe Push-Pull VCO MEMS Oscillators
    Yoon, Y. J.
    Moyer, H. P.
    Kirby, D. J.
    Kubena, R. L.
    Joyce, R. J.
    Bowen, R. L.
    Nguyen, H. D.
    Chang, D. T.
    2015 JOINT CONFERENCE OF THE IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM & THE EUROPEAN FREQUENCY AND TIME FORUM (FCS), 2015, : 76 - 80
  • [9] Micromachined varactor with wide tuning range
    Dec, A
    Suyama, K
    ELECTRONICS LETTERS, 1997, 33 (11) : 922 - 924
  • [10] 10-35-GHz Frequency Reconfigurable RF MEMS 5-Bit DMTL Phase Shifter uses Push-Pull Actuation based Toggle Mechanism
    Dey, Sukomal
    Koul, Shiban K.
    2014 IEEE INTERNATIONAL MICROWAVE AND RF CONFERENCE (IMARC), 2014, : 21 - 24
12345