Extension of the displacement measurement range for electronic speckle-shearing pattern interferometry using carrier fringes and a temporal-phase-unwrapping method

被引:13
|
作者
Martínez-Celorio, RA
Dávila, A
Kaufmann, GH
Mendiola, G
机构
[1] Ctr Invest Opt, Leon 37000, Guanajuato, Mexico
[2] Univ Nacl Rosario, CONICET, Inst Fis Rosario, RA-2000 Rosario, Argentina
关键词
shearing interferometry; spatial synchronous detection; temporal-phase unwrapping; speckle phenomena; optical metrology;
D O I
10.1117/1.602423
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A technique for increasing the displacement measurement range in electronic speckle-shearing pattern interferometry is proposed. The technique is based on the introduction of carrier fringes and the use of a temporal-phase-unwrapping method to obtain larger measuring ranges of out-of-plane displacements of an object without sign ambiguities. A larger measuring range is obtained by dividing the desired maximum-phase range into several subranges where the spatial synchronous detection method can be successfully applied. These phase subranges correspond to small out-of-plane displacements of the object, and a speckle pattern is recorded for each displacement. The carrier fringes are obtained by the subtraction correlation of two consecutive speckle fields with a translation of the illuminating beam between recordings. The method allows the measurement of object displacements of about 216 mu m. (C) 2000 Society of Photo-Optical Instrumentation Engineers. [S0091-3286(00)01803-1].
引用
收藏
页码:751 / 757
页数:7
相关论文
共 41 条