Development of Multilayer Composition Thin Film Thermocouple Cutting Temperature Sensor Based on Magnetron Sputtering

被引：5

作者：

Cui, Y. X. ^{[1
,2
]}

Sun, B. Y. ^{[1
]}

Ding, W. Y. ^{[2
]}

Sun, F. D. ^{[1
]}

机构：

[1] Dalian Univ Technol, Key Lab Precis & Non Tradit Machining Technol, Minist Educ, Dalian, Liaoning, Peoples R China

[2] Dalian Jiaotong Univ, Sch Mech Engn, Dalian, Peoples R China

来源：

ULTRA-PRECISION MACHINING TECHNOLOGIES | 2009年 / 69-70卷

基金：

美国国家科学基金会;

关键词：

Magnetron sputtering; Multilayer composite film; Thermocouple; Cutting temperature sensor;

D O I：

10.4028/www.scientific.net/AMR.69-70.515

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

In the paper, a new multilayer composition thin film thermocouple was developed, which can accurately measure the temperature nearby cutting edge in convenient and fast ways. By means of advanced Twinned microwave ECR plasma source enhanced Radio Frequency (RF) reaction non-balance magnetron sputtering technique, SiO2 insulating film, NiCr/NiSi sensor film and SiO2 protecting film were deposited on the surface HSS substrate. Both static calibration and dynamic calibration were completed. The results showed that the sensor had good performance, good linearity, quick dynamic response, response time constant was 12.7ms. The temperature near the cutting edge in cutting process of aluminum alloy was measured by the developed sensor. The bonding strength between multiple layer film and substrate of high-speed-steel met the presupposed demands.

引用

页码：515 / +

页数：2

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