共 50 条
- [3] Fabrication of high quality ultra-thin HfO2 gate dielectric MOSFETs using deuterium anneal INTERNATIONAL ELECTRON DEVICES 2002 MEETING, TECHNICAL DIGEST, 2002, : 613 - 616
- [5] High performance 40mn nMOSFETs with HfO2 gate dielectric and polysilicon damascene gate INTERNATIONAL ELECTRON DEVICES 2002 MEETING, TECHNICAL DIGEST, 2002, : 429 - 432
- [10] High performance nMOSFET with HfSix/HfO2 gate stack by low temperature process IEEE INTERNATIONAL ELECTRON DEVICES MEETING 2005, TECHNICAL DIGEST, 2005, : 911 - 914