Highly oriented (100) ZnO thin films by spray pyrolysis

被引：74

作者：

Rao, T. Prasada ^{[1
]}

Santhoshkumar, M. C. ^{[1
]}

机构：

[1] Natl Inst Technol, Dept Phys, Adv Mat Lab, Tiruchirappalli 620015, Tamil Nadu, India

来源：

APPLIED SURFACE SCIENCE | 2009年 / 255卷 / 16期

关键词：

ZnO; Spray pyrolysis; Texture coefficient; Sheet resistivity; Ethanol concentration; OPTICAL-PROPERTIES; DEPOSITION; THICKNESS; OXIDE;

D O I：

10.1016/j.apsusc.2009.03.065

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Undoped ZnO thin films have been deposited onto glass substrates by spray pyrolysis. The structural, electrical and optical properties were studied on thin films, prepared from precursor solutions with varying the ethanol concentrations. X-ray diffraction studies have shown polycrystalline nature of the films with a hexagonal wurtzite-type structure. The preferential orientation plane (1 0 0) of the ZnO thin film is found to be sensitive to ethanol concentration. The texture coefficient (TC) and grain size value have been calculated. Also ethanol concentration was found to have significant effect on sheet resistivity of the films. (C) 2009 Elsevier B. V. All rights reserved.

引用

页码：7212 / 7215

页数：4

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