KLu(WO4)2/SiO2 Tapered Waveguide Platform for Sensing Applications

被引：1

作者：

Medina, Marc ^{[1
]}

Rueter, Christian E. ^{[2
]}

Cinta Pujol, Maria ^{[1
]}

Kip, Detlef ^{[2
]}

Masons, Jaume ^{[1
]}

Rodenas, Airan ^{[3
]}

Aguilo, Magdalena ^{[1
]}

Diaz, Francisco ^{[1
]}

机构：

[1] URV, DQFI, Fis & Cristallog Mat & Nanomat FiCMA FiCNA EMaS, Campus Sescelades,C Marcelli Domingo 1, E-43007 Tarragona, Spain

[2] Helmut Schmidt Univ, Fac Elect Engn, D-22043 Hamburg, Germany

[3] ULL, Inst Estudios Avanzados IUdEA, Dept Fis, E-38200 San Cristobal De La Lagu, Spain

来源：

MICROMACHINES | 2019年 / 10卷 / 07期

基金：

欧盟地平线“2020”;

关键词：

tapered waveguides; ultraprecise dicing saw; biochemical sensors; label-free; OPTICAL SENSORS;

D O I：

10.3390/mi10070454

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

This paper provides a generic way to fabricate a high-index contrast tapered waveguide platform based on dielectric crystal bonded on glass for sensing applications. As a specific example, KLu(WO4)(2) crystal on a glass platform is made by means of a three-technique combination. The methodology used is on-chip bonding, taper cutting with an ultra-precise dicing saw machine and inductively coupled plasma-reactive ion etching (ICP-RIE) as a post-processing step. The high quality tapered waveguides obtained show low surface roughness (25 nm at the top of the taper region), exhibiting propagation losses estimated to be about 3 dB/cm at 3.5 mu m wavelength. A proof-of-concept with crystal-on-glass tapered waveguides was realized and used for chemical sensing.

引用

页数：9

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